Particle Control for Semiconductor Manufacturing
Donovan
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
Categories:
Year:
1990
Edition:
1
Publisher:
CRC Press
Language:
english
ISBN 10:
0824782429
ISBN 13:
9780824782429
File:
EPUB, 4.03 MB
IPFS:
,
english, 1990